Cleanroom operation in its current form was started in 2001. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology.
||Fed. Std.209 E Class
||ISO 14644-1 Class
||1 000 m²
Vibrational spectrum from foot traffic on the floor
compared with the Vibration Criteria VC-E Curve:
Vibration spectrum caused by trams compared
with the Vibration Criteria VC-E Curve: