Myfab

Realize your nano vision

Cleanroom info

Cleanroom operation in its current form was started in 2001. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology. 

Cleanroom classes

Laboratory Size Fed. Std.209 E Class ISO 14644-1 Class
Lab 1 1 000 m² 10-100 4-5
Lab 2 240 m² 1000-10000 6-7

Vibration spectra

Vibrational spectrum from foot traffic on the floor
compared with the Vibration Criteria VC-E Curve:

Vibration spectrum caused by trams compared
with the Vibration Criteria VC-E Curve: