Myfab

Realize your nano vision

Göran Alestig

     Göran Alestig

Göran Alestig is external projects coordinator and acting as deputy lab manager. He is also part of the team responsible for thin film deposition and plasma etching. With a background in semiconductor circuit manufacturing, he can help with any general process integration issues.

Tel: +46 31 772 84 96

Mobile: +46 73 0794219

List of tools where Göran Alestig is tool responsible


 NameTypeTool Id
Details4-point probe - CMT SR2000N4-point probe103
DetailsEllipsometer - J.A. Woollam M2000Ellipsometer112
DetailsParameter Analyzer - Keithley 4200SCSParameter analyzer123
DetailsSoftware - SPM/AutoCAD 140
DetailsDry etch Stripper - TePla 228
DetailsOzone Cleaning - FHROzone Cleaning229
DetailsSputter - NORDIKOSputter401
DetailsRTP - Forming gasRapid Thermal Process410
DetailsDry etch RIE - Advanced VacuumRIE etch418
DetailsDry etch RIE - Plasma-ThermRIE etch419
DetailsRTP - AccuThermo AW610 - InP 431
DetailsRTP - AccuThermo AW610 - Wide bandgap 433
DetailsRTP - JIPELEC JetFirst 100Rapid Thermal Process435
DetailsFurnace - Thermolyne - BCB cureFurnace436
DetailsRTP - JIPELEC JetFirst 200Rapid Thermal Process437
DetailsWet Bench - Solvent - Ultrasonic bath - Microwave lineUltrasonic cleaning531
DetailsWet Bench - Acid & Base - Developer Bath - Microwave lineWet bench532
DetailsWet Bench - Acid & Base - Developer Work - Microwave lineWet bench533
DetailsSpinner - BLE & HMDS hotplate - Microwave lineSpinncoater534
DetailsHotplate - Solar-semi & BLE - Microwave lineHot plate535
DetailsVacuum sealerSealer540
DetailsDry etch RIE - Plasma-Therm - OxygenRIE etch422
DetailsRaman microscope - Horiba 128