Processing competence: Has worked with numerous silicon related projects, mostly MEMS applications including deep ASE plasma etching, surface profiling, bonding, contact lithography, oxidation/diffusion, LPCVD/PECVD deposition, metallization and wet chemistry etching (TMAH and KOH silicon etching), both for internal research groups as well as commercial companies.
Main tool responsibilities include DWL laser lithography, Centrotherm LPCVD furnaces and surface profiling.
Tel: +46 31 772 50 55
Mobile: +46 73 034 6292
List of tools where Johan Andersson is tool responsible