Myfab

Realize your nano vision

Ulf Södervall

     Ulf Södervall

Responsible for the training and education for new users of the nanofabrication facilityand coordinating a PhD course in advanced micro and nanofabrication processing. Processspecialist with main focus on Chemical Mechanical Planarisation/Polishing and general wet processing applications, wafer cleaning, etching etc. Has a long experience from materials and surface characterisation mainly from SIMS.

Tel: +46 31 772 34 31

Mobile: +46 70 321 81 78

List of tools where Ulf Södervall is tool responsible

 NameTool IdType
DetailsWet Bench - Acid & Base - Developer Spinner204Wet bench
DetailsSpinner - Suss LabSpin6 & Low temp hotplates219Spinncoater/Hotplate
DetailsFume Hood - Solvent234Wet bench
DetailsFume Hood - Acid & Base - Hot Acid Work236Wet bench
DetailsSpinner - Suss LabSpin6 & High temp hotplates255Spinncoater/Hotplate
DetailsVacuum oven - Hereaus500 
DetailsSpinner - BLE & Oven501Spinncoater/Hotplate
DetailsWet Bench - Solvent - Mask cleaning505Wet bench
DetailsBuffing tool - LCtec - LCD line507 
DetailsAligner & Assembler - Ciposa - LCD line509 
DetailsVacuum packer - LCD line510 
DetailsUV illumination box511 
DetailsGlue Dispensing System - LCD line515 
DetailsWet Bench - Solvent608Wet bench
DetailsWet Bench - Acid & Base - KOH bath & NaOH work609Wet bench
DetailsWet Bench - Solvent - Ultrasonic bath620Ultrasonic cleaning
DetailsWet Bench - Acid & Base - Electroplating621Plating
DetailsWet Bench - Solvent - Ultrasonic bath622Wet bench
DetailsWet Bench - Acid & Base623Wet bench
DetailsWet Bench - Solvent - Liftoff Bath624Wet bench
DetailsWet Bench - Solvent - Ultrasonic bath625Wet bench
DetailsWet Bench - Solvent - Megasonic bath628Megasonic cleaning
DetailsWet Bench - Acid & Base - Standard Clean baths (SC1/SC2)651Wet bench
DetailsWet Bench - Acid & Base - Al-etch bath652Wet bench
DetailsWet Bench - Acid & Base653Wet bench
DetailsWet Bench - Acid & Base654Wet bench
DetailsWet Bench - Solvent - Remover Bath655Wet bench
DetailsFume Hood - Acid & Base - HF & BOE Work656Wet bench
DetailsFume Hood - Acid & Base - PLD target polishing659Wet bench
DetailsFume Hood - Acid & Base - Wash-up660Wet bench
DetailsFurnace - Thermolyne - Open Tube/1600°C713Furnace
DetailsFume Hood - Solvent - Polishing preparation1001Wet bench
DetailsCMP Polishing & Lapping tool - Logitech PM5 #11006Lapping
DetailsWet Bench - Acid & Base1109Wet bench
DetailsWet Bench - Acid & Base1110Wet bench
DetailsWet Bench - Solvent1112Wet bench
DetailsWet Bench - Acid & Base - Piranha Cleaning Bath238Wet bench
DetailsFurnace - Lenton1012Furnace
DetailsCMP Polishing & Lapping tool - Logitech PM5 #21007Lapping
DetailsWet Bench - Acid & Base - BOE bath657