10:00 |
Registration and coffe, sign up for lab tours, mounting of posters |
10:30 - 11:00 | Thomas Swahn and Kay Gastinger, presentation of Myfab and Norfab, Siegbahnsalen |
11:00 - 11:30 | Aron Stein, Center for Functional Nanomaterials at Brookhaven National Laboratory, ”Electron Beam Lithography for Synchrotron Applications”, Siegbahnsalen |
11:30 - 12:00 | Rainer Adelung, Christian-Albrechts-University Kiel, Germany, "Multifunctional ZnO nanostructures: from viruses to microchips", Siegbahnsalen |
12:00 - 13:15 | Lunch and poster session |
13:15 - 16:30 |
Thematic seminars, coffee available. The thematic seminars consist of 40-minutes presentations + time for questions and discussion.The presentations aim to educate in techniques and tools with a practical approach. The themes of the thematic seminars are: |
Materials Analysis and Characterization Electron, ion beam and probing technologies will be reviewed in tutorial presentations. Most of this is available within our infrastructures and instructive examples will be given. Some outlook into new technologies and possibilities will also be presented. |
Thin film technologies The choice of method for deposition of thin films will eventually determine the properties of the final device. Some key methods for thin film deposition, available within our infrastructures, will be described in detail. Both technology and device examples will be given. |
Etching Technologies An historic overview, with present status and development trends will be followed by seminars devoted to specific technologies or materials. The presentations should give some knowledge about strong areas at the various sites within our infrastructures. |
Lithography Tutorial presentations about electron beam lithography, stepper and contact lithography, imprint and resist technology. The presentations should also include an overview of the available technologies at the various infrastructures. |
15:00 - 15:30 | Coffee |
Analysis | |
13:15 - 14:10 | “FIB/SEM methods for analysis and characterization”, Fredrik Ericson (UU), Ken Roger Erwik (NTNU) |
14:10 - 15:00 | “TEM - why, how and where?”, Klaus Leifer (UU), Randi Holmestad (NTNU) |
15:30 - 16:30 | "Characterization of surface properties by electron and mass spectroscopy (XPS, Auger and SIMS)”, John Walmsley (NICE, SINTEF Materials and Chemistry) and Alexei Zakharov (MAX Lab) |
Thin Film technologies | |
13:15 - 14:10 | “Si-Ge-Sn materials for electronic and photonic applications”, Henry Radamson (KTH) |
14:10 - 15:00 | "Chemical vapor deposition of large area graphene: the technique towards real applications", Jie Sun (Chalmers) |
15:30 - 16:30 | “MOVPE, growth of ZnO”, Vishnukanthan "Vishnu" Venkatachalapathy (UiO) |
Lithography | |
13:15 - 14:10 | “High Resolution Electron Beam Lithography”, Piotr Jedrasik (Chalmers) |
14:10 - 15:00 | ”Stepper lithography”, Per-Erik Hellström (KTH) |
15:30 - 16:30 | “Nanoimprint as next-generation lithography in nanofabrication”,Ivan Maximov (Lund U) |
Etching technology | |
13:15 - 14:10 | “Introduction & Overview”, Hans-Olof Blom (UU) |
14:10 - 15:00 | “Ion Beam Etching”, Mats Hagberg (Chalmers) |
15:30 - 16:30 | “Deep Silicon Etching at MyFab - a Comparative Study”,Gabriel Roupillard (KTH) |
16:30 - 18:30 | Poster Session and lab tours. Lab tours start at the registration desk at 16:30-16:50, 16:50-17:10, 17:10-17:30, 17:30-17:50 |
19:00 | Dinner at Norrlands Nation, Västra Ågatan 14, Uppsala |
09:00 - 11:00 |
Thematic seminars, coffee available. The thematic seminars consist of 40-minutes presentations + time for questions and discussion.The presentations aim to educate in techniques and tools with a practical approach. The themes of the thematic seminars are: Analysis, Thin film technologies, Lithography and Etching technology. |
Analysis | |
09:00 - 10:00 | “Electrical, optical, and mechanical characterisation of Nanowires” , To be decided |
10:00 - 11:00 | “Scanning Probe techniques (AFM, STM)” Daniel Forchheimer (KTH), Klaus Magnus Johansen (UiO) |
Thin Film technologies | |
09:00 - 10:00 | “Growth and in situ doping of III-V nanowires”, Jesper Wallentin (Lund U) |
10:00 - 11:00 | “ALD / CVD: Chemical Routes to Ultra Thin Films”, Mats Boman (UU) |
Lithography | |
09:00 - 10:00 | “Helium Ion Microscopy - Extending the frontiers of nanotechnology”, Peter Gnauck (Zeiss) |
10:00 - 11:00 | To be determined |
Etching technology | |
09:00 - 10:00 | “Metal & Metal Oxide Etching”, Colin Welch (Oxford PT) |
10:00 - 11:00 | “Compoud Semiconductor Etching”, David Lishan (Plasma-Therm) |
11:00 - 12:30 | Lunch and coffee |
12:30 - 13:45 | Academic and entrepreneurial exploitation – two inspiring presentations This session consists of two 30-minutes presentations + time for questions and discussion. The presentations aim to inspire Myfab users primarily in their early stages of their carriers, to be eye openers, and to invite to active participation with questions. Both speakers have a long track-record of success from their fields, and will present examples and real-life proven advice which might take you further in your career. |
12:30 - 13:10 | Bo Hammarlund, “Cutting Edge Technology Startup process”, Siegbahnsalen Bo Hammarlund , civ .ing ( KTH ’82) Optoelectronic materials R&D , Inter’l B2B Sales and Marketing, Entrepreneur since 2005 ( co-founder in TranSiC (sold 2010 to Fairchild Semiconductors), SenSiC, Scint-X, SensAbues , Ascatron, Nocilis Materials, Epiclarus, SenseM, Polly Power, EN3AD ) |
13:10 - 13:45 | Joseph Gorman, Senior scientist in SINTEF ICT, ”Successful launch of European projects “, Siegbahnsalen |
13:45 - 14:15 | Andreas Vogl, SINTEF ICT, “PiezoMEMS with thin-film PZT - A key enabling technology”, Siegbahnsalen |
14:15 - 14:40 | Coffee |
14:40 - 15:10 | Christoph Quitmann, Director Max IV Lab, Siegbahnsalen |
15:10 - 15:15 | Concluding remarks |