Program Myfab and Norfab User Meeting 2013

Program

Wednesday April 17

10:00

Registration and coffe, sign up for lab tours, mounting of posters

10:30 - 11:00 Thomas Swahn and Kay Gastinger, presentation of Myfab and Norfab, Siegbahnsalen
11:00 - 11:30  Aron Stein, Center for Functional Nanomaterials at Brookhaven National Laboratory,
”Electron Beam Lithography for Synchrotron Applications”, Siegbahnsalen
11:30 - 12:00 Rainer Adelung, Christian-Albrechts-University Kiel, Germany,
"Multifunctional ZnO nanostructures: from viruses to microchips", Siegbahnsalen
12:00 - 13:15 Lunch and poster session 
13:15 - 16:30

Thematic seminars, coffee available.

The thematic seminars consist of 40-minutes presentations + time for questions and discussion. 
The presentations aim to educate in techniques and tools with a practical approach.
The themes of the thematic seminars are:
Materials Analysis and Characterization
Electron, ion beam and probing technologies will be reviewed in tutorial presentations. Most of this is available within our infrastructures and instructive examples will be given. Some outlook into new technologies and possibilities will also be presented.
Thin film technologies
The choice of method for deposition of thin films will eventually determine the properties of the final device. Some key methods for thin film deposition, available within our infrastructures, will be described in detail. Both technology and device examples will be given.
Etching Technologies
An historic overview, with present status and development trends will be followed by seminars devoted to specific technologies or materials. The presentations should give some knowledge about strong areas at the various sites within our infrastructures.
Lithography
Tutorial presentations about electron beam lithography, stepper and contact lithography, imprint and resist technology. The presentations should also include an overview of the available technologies at the various infrastructures.
15:00 - 15:30 Coffee
Analysis  
13:15 - 14:10 “FIB/SEM methods for analysis and characterization”, Fredrik Ericson (UU), Ken Roger Erwik (NTNU)
14:10 - 15:00 “TEM - why, how and where?”, Klaus Leifer (UU), Randi Holmestad (NTNU)
15:30 - 16:30 "Characterization of surface properties by electron and mass spectroscopy (XPS, Auger and SIMS)”,
John Walmsley (NICE, SINTEF Materials and Chemistry) and Alexei Zakharov (MAX Lab)
Thin Film technologies  
13:15 - 14:10 “Si-Ge-Sn materials for electronic and photonic applications”, Henry Radamson (KTH)
14:10 - 15:00 "Chemical vapor deposition of large area graphene: the technique towards real applications", Jie Sun (Chalmers)
15:30 - 16:30 “MOVPE, growth of ZnO”, Vishnukanthan "Vishnu" Venkatachalapathy (UiO)
Lithography  
13:15 - 14:10 “High Resolution Electron Beam Lithography”, Piotr Jedrasik (Chalmers)
14:10 - 15:00 ”Stepper lithography”, Per-Erik Hellström (KTH)
15:30 - 16:30 “Nanoimprint as next-generation lithography in nanofabrication”,Ivan Maximov (Lund U)
Etching technology  
13:15 - 14:10 “Introduction & Overview”, Hans-Olof Blom (UU)
14:10 - 15:00 “Ion Beam Etching”, Mats Hagberg (Chalmers)
15:30 - 16:30 “Deep Silicon Etching at MyFab - a Comparative Study”,Gabriel Roupillard (KTH)
16:30 - 18:30 Poster Session and lab tours.
Lab tours start at the registration desk at 16:30-16:50, 16:50-17:10, 17:10-17:30, 17:30-17:50
19:00 Dinner at Norrlands Nation, Västra Ågatan 14, Uppsala

Thursday April 18

09:00 - 11:00

Thematic seminars, coffee available.

The thematic seminars consist of 40-minutes presentations + time for questions and discussion. 
The presentations aim to educate in techniques and tools with a practical approach.
The themes of the thematic seminars are: Analysis, Thin film technologies,
Lithography and Etching technology.
Analysis  
09:00 - 10:00 “Electrical, optical, and mechanical characterisation of Nanowires” , To be decided
10:00 - 11:00 “Scanning Probe techniques (AFM, STM)” Daniel Forchheimer (KTH), Klaus Magnus Johansen (UiO)
Thin Film technologies  
09:00 - 10:00 “Growth and in situ doping of III-V nanowires”, Jesper Wallentin (Lund U)
10:00 - 11:00 “ALD / CVD: Chemical Routes to Ultra Thin Films”, Mats Boman (UU)
Lithography  
09:00 - 10:00 “Helium Ion Microscopy - Extending the frontiers of nanotechnology”, Peter Gnauck (Zeiss)
10:00 - 11:00 To be determined
Etching technology  
09:00 - 10:00 “Metal & Metal Oxide Etching”, Colin Welch (Oxford PT)
10:00 - 11:00 “Compoud Semiconductor Etching”, David Lishan (Plasma-Therm)
11:00 - 12:30 Lunch and coffee
12:30 - 13:45 Academic and entrepreneurial exploitation – two inspiring presentations
This session consists of two 30-minutes presentations + time for questions and discussion.
The presentations aim to inspire Myfab users primarily in their early stages of their carriers,
to be eye openers, and to invite to active participation with questions.
Both speakers have a long track-record of success from their fields, and will present examples
and real-life proven advice which might take you further in your career.
12:30 - 13:10 Bo Hammarlund, “Cutting Edge Technology Startup process”, Siegbahnsalen
Bo Hammarlund , civ .ing ( KTH ’82) Optoelectronic materials R&D , Inter’l B2B Sales and Marketing,
Entrepreneur since 2005 ( co-founder in TranSiC (sold 2010 to Fairchild Semiconductors), SenSiC, Scint-X, SensAbues , Ascatron, Nocilis Materials, Epiclarus, SenseM, Polly Power, EN3AD )
13:10 - 13:45 Joseph Gorman, Senior scientist in SINTEF ICT, ”Successful launch of European projects “, Siegbahnsalen
13:45 - 14:15 Andreas Vogl, SINTEF ICT, “PiezoMEMS with thin-film PZT - A key enabling technology”, Siegbahnsalen
14:15 - 14:40 Coffee
14:40 - 15:10 Christoph Quitmann, Director Max IV Lab, Siegbahnsalen
15:10 - 15:15 Concluding remarks