LIST_TYPE_PREDEFINED_LIST Thermal processes

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Thermal processes

  Thermal Processes
Thermal processing includes a diversity of processes where high temperatures are used. Hence, annealing may be necessary to activate dopants after ion implantation or to alloy contacts after metal deposition, while treatment in a chemically active atmosphere is used to change the surface layer, e.g., by diffusion of dopants and thermal oxidation of a Si surface.
 
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