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Electrum Quality Manual
Virtual Cleanroom
1.
Corridor
2.
Gowning room
3.
APL Centura
4.
Gul 3
5.
Q-etch
6.
Wet chemistry
7.
Epi III/V
8.
Mozart
9.
Disco saw
10.
APL-gul
11.
APL-analys
12.
APL-SiC
13.
Hybridisering
14.
ATP
15.
Plasma III/V
16.
Metal III/V
17.
Gul 1
18.
Anneal
19.
Furnace
20.
Furnace service
21.
Si-met
22.
23.
Facility
1.
Ventilation
2.
Gas delivery system
3.
Service and media
4.
Equipment installation
KTH/Acreo
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User Information
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Virtual-Clean-Room-Tour
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Facility
Facility
Facility
All pictures can be viewed in larger format, just click on them.
Facility
1.
Ventilation
2.
Gas delivery system
3.
Service and media
4.
Equipment installation
