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Furnace room

Furnace Room

Enter furnace room service finger

This is the furnace room. Before wafers can be treated at high temperature, 600-1250 °C, they must be cleaned in chemical mixtures like "seven-up" and "IMEC".

A number of wafers are loaded on a carrier and put on a paddle that automatically is loaded into the furnace. 


 This room also contains an interferometer for measuring film thickness.

All pictures can be viewed in larger format, just click on them.

Return to start of Virtual Clean Room Lab Tour

2010-03-31 Per Wehlin