Realize your nano vision


One of the unique features of LNL is its close coupling between the manufacturing of the semiconductor structures by epitaxial growth and the pre- and post-processing of the nanostructures and nanodevices. The laboratory is designed with a cleanroom staircase between nanoprocessing and epitaxial parts to simplify sample transfer and allow researchers from both parts to meet and discuss scientific issues. This close interaction between the crystal growers, processing and characterization scientists, and physicists is an absolute requirement for a successful development of fundamental physics and device-oriented research.

Key features of LNL:

  • Fabrication and analysis of structures on nanometer-scale
  • Integration between epitaxy and processing
  • Open cleanroom facility for academic research and companies
  • 300 m2 cleanroom for cutting edge nanofabrication
  • Industrial product development and prototype testing

Lund Nano Lab is one of the main resources within the NanoLund (formely known as the Nanometer Structure Consortium at Lund University) and provide support to research groups in the strategically important areas of research listed below.

  • Nanowire growth and material science
  • Fundamental and device physics, electronics and photonics
  • Nano-bio and life science
  • Nanoimprint lithography
  • Growth and physics of new materials
  • Nanowire-based photo-voltaics
  • Processing of nanoelectronic devices and circuits

LNL consists of two main parts: Nano-process lab on floor 1 and Nano-epitaxy lab on floor 2. Besides, nano-epitaxy part is integrated with the old Berzelius laboratory so it is possible to easily move between them. The Nano-process laboratory features ISO 5 cleanroom standard (≈"class 100") of about 180 m2, the Nano-epitaxy laboratory occupies about 160 m2 of ISO 7 (≈"class 10 000") cleanroom standard. Sensitive equipment (electron beam lithography, scanning electron/focused ion beam microscope etc) in the Nano-process lab is installed on three independent anti-vibration platforms for a high resolution performance.

The laboratory is available for all users of NanoLund, other academic groups, both within the Lund University and outside, and commercial companies. LNL provides regular cleanroom safety introduction course and individual hand-on training on lab equipment. The lab staff offers a qualified support how to use the equipment and help in processing and characterization of nano-structures. The list of available lab equipment the responsible persons can be found at Laboratory Information and Management System (LIMS) home page. The LIMS has been developed by Myfab consortium of cleanrooms in Sweden, where LNL became a member in April 2016.

Organizationally Lund Nano Lab belongs to the Division of Solid State Physics, Lund University, but operates as an independent unit within the Division. Reference Group of LNL headed by the LNL Coordinator I. Maximov is responsible for strategic planning and coordination of the lab activity, while day-to-day operation is managed by the Lab Operations Manager M. Huffman.